BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//Semirai//Conferences//JA
CALSCALE:GREGORIAN
BEGIN:VEVENT
UID:spie-optical-euv-2027@semirai.com
DTSTAMP:20261024T000000Z
DTSTART;VALUE=DATE:20270221
DTEND;VALUE=DATE:20270226
SUMMARY:SPIE Optical/EUV 2027（SPIE 光・EUVナノリソグラフィ）
LOCATION:サンノゼ（米国）
DESCRIPTION:SPIEが主催する、光露光とEUV露光を扱う国際会議。\n公式サイト: https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning\nhttps://semirai.com/events/conferences/spie-optical-euv
URL:https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning
END:VEVENT
END:VCALENDAR