Kanken Techno
A Japanese maker of abatement systems for semiconductor and FPD fabs that treat exhaust gases such as silane, fluorine compounds and PFCs by combustion, plasma or wet scrubbing.
カンケンテクノ・Fab infrastructure・Last updated: October 27, 2026
Overview
Kanken Techno specializes in point-of-use abatement systems, often called scrubbers, which make process exhaust gases harmless before they leave the fab.
Its systems use combustion, plasma and wet methods and include units that decompose PFCs, which are strong greenhouse gases.
Business: Exhaust gas abatement systems (scrubbers)
Why it matters
- Etch and CVD tools emit toxic, flammable and greenhouse gases, so each tool usually has its own abatement unit.
- PFC abatement is part of how chipmakers reduce their direct greenhouse gas emissions.
Main products
- •Exhaust gas abatement systems (scrubbers)
- •PFC decomposition systems
Products (1)
- KT1000 series · Exhaust gas abatement systems