Air Water
An Osaka-based industrial group whose semiconductor-related products include CMP slurry blending and supply systems for fabs.
エア・ウォーター・Equipment・Last updated: October 23, 2026
Overview
Air Water is headquartered in Osaka. For semiconductor fabs, its mechatronics business offers the Mega MFⅦ system, which blends CMP slurry to a consistent concentration and particle size and supplies it centrally to CMP tools. The system is made in Japan under license from Kinetics Equipment Group.
The surrounding lineup covers local slurry supply for R&D, central supply of ammonium persulfate and surfactants, automatic hydrogen peroxide concentration control and a SCADA system for monitoring.
Business: CMP slurry blending and supply systems
Why it matters
Slurry handling affects CMP defects: settling or agglomeration of abrasive particles causes scratches and removal-rate variation.
Its slurry systems are manufactured in Japan under a license from Kinetics.
Main products
- •CMP slurry blending and supply systems (Mega MFⅦ)
- •Chemical concentration control and monitoring systems
Sites in Japan
Head officeHeadquarters
Osaka, Osaka
Products (1)
- Mega™ MFⅦ · Slurry delivery and recovery systems