Hugle Electronics
A Japanese maker of FOUP and FOSB cleaning systems and soft X-ray ionizers for semiconductor and FPD manufacturing.
ヒューグルエレクトロニクス・Equipment・Last updated: October 23, 2026
Overview
Hugle Electronics makes the UPC-12500 (SORA), a fully automatic cleaning system for 300 mm FOUPs and FOSBs that uses two-fluid jets and opens and closes FOUP lids automatically to prevent cross-contamination.
It also makes IRISYS-SX, a soft X-ray ionizer that can be retrofitted inside FPD and semiconductor equipment to remove static.
Business: Carrier cleaning systems and ionizers
Why it matters
Dirty wafer carriers transfer particles to wafers, so carriers are cleaned regularly in 300 mm fabs.
Main products
- •FOUP/FOSB cleaning systems (UPC-12500)
- •Soft X-ray ionizers (IRISYS-SX)
Products (2)
- UPC-12500 (SORA) FOUP/FOSB cleaning system · Carrier cleaning equipment
- IRISYS®-SX · Ionizers (static elimination)