Japanese Cleanroom and Fab Infrastructure Suppliers
Japanese suppliers of the systems a fab runs on outside the process tools: cleanrooms and air filters, ultrapure water, exhaust gas abatement, gas detection, static control and automated material handling.
- Companies15
- Equipment categories2
- Prefectures with sites5
Overview
A fab needs a controlled environment before it can run any process: filtered air, ultrapure water, safe handling of toxic and flammable gases, and automated transport of wafers between tools. These systems are a large share of the cost of building a new fab.
New fabs in Kumamoto, Hokkaido and elsewhere in Japan have brought more attention to these suppliers, which range from water treatment and cleanroom engineering companies to makers of filters, abatement systems and automated transport.
Companies (15)
- DaifukuCleanroom automated material handling systems (AMHS) · HQ: Osaka, Osaka · 1 product page
- Air WaterCMP slurry blending and supply systems · HQ: Osaka, Osaka · 1 product page
- Cambridge Filter CorporationHEPA and ULPA air filters for cleanrooms · HQ: Minato, Tokyo · 1 product page
- Hugle ElectronicsCarrier cleaning systems and ionizers · 2 product pages
- Murata Machinery (Muratec)Stockers and fab automation · 2 product pages
- Riken KeikiGas detection systems · HQ: Itabashi, Tokyo · 1 product page
- Shishido ElectrostaticIonizers (static elimination) · HQ: Tokyo · 1 product page
- Yokogawa ElectricFab software: MES, equipment communication and cell control · HQ: Tokyo · 3 product pages
- Kurita Water IndustriesUltrapure water systems and wastewater treatment · HQ: Tokyo
- OrganoUltrapure water systems, water recycling and functional water · HQ: Tokyo
- Nomura Micro ScienceUltrapure water systems · HQ: Atsugi, Kanagawa
- Kanken TechnoExhaust gas abatement systems (scrubbers) · 1 product page
- Airtech JapanCleanrooms, clean benches, air showers and FFUs · HQ: Taito, Tokyo
- Nitto Reinetsu SeisakushoAir showers, fan filter units and clean booths · HQ: Hanno, Saitama
- Nippon MukiHEPA, ULPA and chemical filters and cleanroom equipment · HQ: Taito, Tokyo
Equipment categories
Product categories where these companies are listed, with the number of companies from this page in each.
Related reading
Other equipment sectors: Wafer processing equipment · Inspection and metrology · Wafer manufacturing equipment · Back-end and packaging equipment · Test and reliability equipment · Equipment components
Japanese companies by sector
- Japanese semiconductor companies
- Japanese Wafer, Substrate and Photomask Suppliers
- Japanese Semiconductor Process Materials Suppliers
- Japanese Semiconductor Packaging Materials Suppliers
- Japanese Equipment Parts and Consumables Suppliers
- Japanese Chipmakers, Foundries and OSATs
- Japanese Power, Optical and Sensor Device Makers
- Japanese Wafer Processing Equipment Makers
Last updated: October 27, 2026