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RS Technologies

A Japanese company whose main business is reclaiming used test and monitor wafers from fabs by chemical treatment and polishing, which also makes prime wafers in China.

RSテクノロジーズ・Wafers, substrates and photomasks・Last updated: October 27, 2026

Overview

RS Technologies takes used test and monitor wafers from semiconductor fabs, strips the films on them with chemicals, polishes them and returns them for reuse.

It also manufactures prime silicon wafers in China.

Business: Reclaimed silicon wafers and prime wafers

Why it matters

  • Fabs use many wafers only to check tools and processes, and reclaiming them is cheaper than buying new ones.
  • Reclaim volume grows with the number of process steps that need monitor wafers.

Main products

  • •Reclaimed wafers
  • •Prime wafers

Related pages

Sources

  1. RS Technologies: official website
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Japanese Wafer, Substrate and Photomask Suppliers