TOCALO
A Kobe-based thermal spray coating company that applies plasma-resistant coatings such as yttria to chamber parts of semiconductor equipment and refurbishes used parts.
トーカロ・Equipment parts and consumables・Last updated: October 27, 2026
Overview
TOCALO is headquartered in Kobe, Hyogo and specializes in thermal spraying. For semiconductor equipment it coats chamber parts with plasma-resistant materials such as yttria (Y2O3).
The coatings reduce particles and extend part life, and the company also cleans and recoats used parts.
Business: Thermal spray coatings and refurbishment of equipment parts
Why it matters
- Fluorine and chlorine plasmas erode chamber walls, and eroded material can land on wafers as particles.
- Refurbishing parts by stripping and recoating is cheaper than replacing them.
Main products
- •Yttria thermal spray coatings
- •Plasma-resistant coatings
- •Refurbishment of equipment parts
Sites in Japan
Head officeHeadquarters
Kobe, Hyogo