NOK Corporation
A Tokyo-based seal maker best known for oil seals and O-rings that supplies vacuum seals with improved plasma resistance and low outgassing for semiconductor equipment.
NOK・Equipment parts and consumables・Last updated: October 27, 2026
Overview
NOK Corporation is headquartered in Minato, Tokyo and specializes in seals. It formulates its own rubber compounds and makes oil seals, O-rings and gaskets.
For semiconductor equipment it supplies vacuum seals designed to resist plasma and release little gas.
Business: O-rings and vacuum seals
Why it matters
- Chamber O-rings exposed to plasma degrade and can shed particles, so seal materials affect both uptime and yield.
- Seal compounds are developed in house from the rubber formulation up.
Main products
- •Vacuum seals for semiconductor equipment
- •O-rings and gaskets
- •Oil seals
Sites in Japan
Head officeHeadquarters
Minato, Tokyo