Japanese Equipment Parts and Consumables Suppliers
Japanese suppliers of parts that wear out or must stay clean inside equipment: ceramic electrostatic chucks and heaters, quartz parts, seals, plasma-resistant coatings, wafer carriers, polishing pads and dicing blades.
- Companies13
- Equipment categories2
- Prefectures with sites4
Overview
Chamber parts are exposed to plasma, heat and corrosive chemicals, and they are replaced or refurbished on a schedule. Their material and surface quality affect particle levels and tool uptime as much as the tool design does.
Japanese ceramics, quartz, rubber and resin companies supply many of these parts, along with wafer carriers (FOUPs), polishing pads and diamond tools that are consumed in proportion to the number of wafers processed.
Companies (13)
- FerrotecQuartz, silicon and ceramic parts for equipment; thermoelectric modules · HQ: Chuo, Tokyo
- Nitta DuPontCMP and wafer polishing pads · 2 product pages
- VALQUASeals and fluoropolymer products · HQ: Shinagawa, Tokyo · 1 product page
- NGK InsulatorsElectrostatic chucks, ceramic heaters and susceptors · HQ: Nagoya, Aichi · 1 product page
- TOTOElectrostatic chucks and fine ceramic parts · HQ: Kitakyushu, Fukuoka
- NTK CeratecCeramic heaters, electrostatic chucks and susceptors
- TOCALOThermal spray coatings and refurbishment of equipment parts · HQ: Kobe, Hyogo
- Shin-Etsu Quartz ProductsHigh-purity quartz glass parts and crucibles
- MiraialFOUPs, FOSBs and wafer containers · 1 product page
- Shin-Etsu PolymerFOUPs, FOSBs and reticle pods · HQ: Tokyo · 1 product page
- FujiboPolishing pads for CMP and wafer polishing
- Asahi Diamond IndustrialDicing blades, grinding wheels and CMP pad conditioners
- NOK CorporationO-rings and vacuum seals · HQ: Minato, Tokyo
Equipment categories
Product categories where these companies are listed, with the number of companies from this page in each.
Related reading
- Japanese semiconductor equipment component suppliers
- Semiconductor materials where Japan leads
- Japanese semiconductor equipment by category
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Japanese Equipment Parts and Consumables Suppliers
Last updated: October 27, 2026