NGK Insulators
A Nagoya-based ceramics company that supplies electrostatic chucks, ceramic heaters and susceptors made of high-purity, heat-resistant ceramics for the chambers of semiconductor equipment.
日本ガイシ・Equipment parts and consumables・Last updated: October 27, 2026
Overview
NGK Insulators is headquartered in Nagoya and builds its businesses on ceramic technology. For semiconductor equipment it supplies chamber parts made of aluminium nitride and alumina ceramics.
These include electrostatic chucks, ceramic heaters and susceptors that hold and heat wafers in high-temperature and plasma environments.
Business: Electrostatic chucks, ceramic heaters and susceptors
Why it matters
- Aluminium nitride conducts heat well and resists plasma, which makes it a common material for heaters in CVD chambers.
- The heater or chuck under the wafer sets temperature uniformity, so it affects every film deposited on it.
Main products
- •Electrostatic chucks (ESCs)
- •Ceramic heaters
- •Susceptors
Sites in Japan
Head officeHeadquarters
Nagoya, Aichi
Products (1)
- Bonded wafers for SAW filters · Specialty substrates (sapphire, LT/LN, glass)