NTK Ceratec
A fine ceramics maker in the Niterra (formerly NGK Spark Plug) group that supplies ceramic heaters, electrostatic chucks and susceptors for etchers and plasma CVD systems.
NTKセラテック・Equipment parts and consumables・Last updated: October 27, 2026
Overview
NTK Ceratec belongs to the Niterra group, formerly NGK Spark Plug. It sinters high-thermal-conductivity ceramics such as aluminium nitride and designs electrostatic chucks and heaters as single units.
Its products are used in etch and plasma CVD equipment at both high and low temperatures. It also makes piezoelectric ceramics and metal-ceramic composites.
Business: Ceramic heaters, electrostatic chucks and susceptors
Why it matters
- Combining chucking electrodes and heater elements in one sintered body lets a part both hold and heat the wafer.
- Material formulation and sintering decide the thermal and electrical behaviour of these parts.
Main products
- •Electrostatic chucks (ESCs)
- •Ceramic heaters
- •Susceptors