Tosoh
A Tokyo-based chemical company whose semiconductor materials include sputtering targets, organometallic precursors for ALD and CVD, and high-purity quartz glass.
東ソー・Process chemicals, gases and targets・Last updated: October 27, 2026
Overview
Tosoh is headquartered in Tokyo, with large chemical complexes in Shunan, Yamaguchi and Yokkaichi, Mie. Its semiconductor materials include sputtering targets for metals and nitrides such as Cu, Ta and TiN.
It also develops organometallic precursors for ALD and CVD, such as hafnium and zirconium compounds, and supplies high-purity synthetic quartz glass.
Business: Sputtering targets, ALD/CVD precursors and quartz glass
Why it matters
- High-k gate dielectrics and capacitor films are deposited by ALD from precursors such as hafnium compounds.
- Precursors and targets are consumed in proportion to wafer output, like other process materials.
Main products
- •Sputtering targets (Cu, Ta, TaN, TiN)
- •ALD and CVD precursors
- •High-purity synthetic quartz glass
Sites in Japan
Head officeHeadquarters
Tokyo
Nanyo ComplexPlant
Shunan, Yamaguchi
Yokkaichi ComplexPlant
Yokkaichi, Mie
Advanced Materials Research LaboratoryR&D
Ayase, Kanagawa