Kanto Denka Kogyo
A Japanese chemical company that supplies high-purity fluorine-based specialty gases used in semiconductor etching and deposition.
関東電化工業・Process chemicals, gases and targets・Last updated: October 27, 2026
Overview
Kanto Denka Kogyo makes fluorine-based specialty gases. These high-purity process gases are used in etching and in cleaning deposition chambers.
Fluorine compounds are also used to clean the inside of CVD chambers between runs: a plasma of a fluorine-containing gas turns deposits on the chamber walls into volatile compounds that are pumped away. Many of these gases have high global warming potential, so their use is tracked and abated in fabs.
Business: Fluorine-based specialty gases
Why it matters
- Plasma etching of oxide and nitride layers relies on fluorine-containing gases.
- 3D NAND, with its deep holes through many layers, has increased the use of etch gases.
Main products
- •Fluorine-based process gases for etching
- •Fluorine-based chamber cleaning gases
Sites in Japan
Head officeHeadquarters
Tokyo