Creative Technology
A Kawasaki-based specialist in electrostatic chucks (ESCs) and their power supplies and controllers, which also regenerates used chucks for semiconductor and FPD equipment.
クリエイティブテクノロジー・Equipment components・Last updated: October 27, 2026
Overview
Creative Technology focuses on electrostatic chucks, which hold wafers or glass substrates in place with an electric field instead of mechanical clamps.
Creative Technology is based in Takatsu, Kawasaki. It supplies the chuck together with its dedicated power supply and controller, and also offers a regeneration service that restores used chucks.
Business: Electrostatic chucks and chuck power supplies
Why it matters
- In plasma etching the ESC also carries heat away from the wafer, so it affects both wafer holding and temperature.
- Releasing the wafer cleanly after processing depends on how the chuck voltage is controlled.
Main products
- •Electrostatic chucks (ESCs)
- •ESC power supplies and controllers
- •ESC regeneration service
Sites in Japan
Head officeHeadquarters
Kawasaki, Kanagawa