Anritsu Meter
A Japanese temperature measurement specialist that makes contact surface thermometers and thermocouples, including thermocouple-instrumented wafers that measure real wafer temperature inside equipment.
安立計器工業・Equipment components・Last updated: October 27, 2026
Overview
Anritsu Meter specializes in contact surface thermometers and thermocouples. It makes the thermocouples and calibrates the instruments itself.
For semiconductor equipment it supplies wafers fitted with thermocouples to measure temperature at the wafer surface, as well as radiation thermometers, fiber-optic thermometers and temperature calibrators.
Business: Thermocouples, surface thermometers and instrumented wafers
Why it matters
- Process recipes depend on the actual wafer temperature, which can differ from the heater setpoint, so instrumented wafers are used to calibrate tools.
- Fiber-optic thermometers can measure in plasma or RF environments where metal sensors would be disturbed.
Main products
- •Thermocouple instrumented wafers
- •Contact surface thermometers
- •Fiber-optic and radiation thermometers
- •Temperature calibrators
Products (1)
- AW series thermocouple wafers · Instrumented wafers