Showa Science
A Kawasaki-based specialist in vibration isolation tables, air springs and soundproof enclosures for electron microscopes, exposure tools and other vibration-sensitive equipment.
昭和サイエンス・Equipment components・Last updated: October 27, 2026
Overview
Showa Science is headquartered in Kawasaki, Kanagawa. It makes passive air-spring isolation tables and active isolation tables, and designs its own air springs.
It also makes soundproof boxes and equipment stands, so it can build the whole installation environment for sensitive instruments.
Business: Vibration isolation tables and air springs
Why it matters
- Floor vibration limits the resolution of electron microscopes, inspection tools and lithography systems.
- Isolation depends on the site, so it is usually engineered for each installation rather than supplied by the tool maker.
Main products
- •Air-spring vibration isolation tables
- •Active vibration isolation tables
- •Soundproof enclosures and stands
Sites in Japan
Head officeHeadquarters
Kawasaki, Kanagawa