Japanese Semiconductor Equipment Component Suppliers

Overview

A deposition or etch tool is assembled from hundreds of bought-in parts. Flow controllers and valves decide how accurately gases reach the chamber, RF power supplies sustain the plasma, chillers hold electrode temperature, and robots move wafers between load ports and chambers.

Many of these component makers sell to the large equipment makers rather than to fabs, so they are less visible, but their tolerances limit what the finished tool can do. Japan has a deep base of such suppliers, many of them specialists in one component.

Companies (31)

• HORIBA
  Mass flow controllers and process monitoring instruments · HQ: Kyoto, Kyoto · 3 product pages
• CKD
  Process gas regulators and fluid control components · HQ: Aichi · 1 product page
• Fujikin
  Gas flow controllers and integrated gas systems · HQ: Osaka, Osaka · 2 product pages
• IWAKI
  Chemical pumps · 2 product pages
• Iwasaki Electric
  Ozone generators and lighting · HQ: Shinjuku, Tokyo · 1 product page
• Kashiyama Industries
  Dry vacuum pumps · HQ: Nagano · 1 product page
• Nippon Thompson (IKO)
  Linear motion components and precision positioning tables · HQ: Tokyo · 1 product page
• RORZE
  Wafer handling robots and sorters · 2 product pages
• ULVAC Cryogenics
  Cryopumps · HQ: Chigasaki, Kanagawa · 1 product page
• Yaskawa Electric
  Wafer transfer robots · HQ: Kitakyushu, Fukuoka · 1 product page
• Sinfonia Technology
  Load ports, EFEMs and wafer transfer robots · HQ: Tokyo
• Hirata Corporation
  EFEMs, load ports and wafer transfer units · HQ: Shinagawa, Tokyo
• Daihen
  RF power supplies, matching networks and wafer transfer robots · HQ: Osaka
• Kyosan Electric Manufacturing
  Power supplies for semiconductor and FPD equipment · HQ: Yokohama, Kanagawa
• Harmonic Drive Systems
  Strain wave gears and precision actuators · HQ: Tokyo
• Harmotec
  Robot hands and non-contact transfer for thin wafers · HQ: Kofu, Yamanashi
• Sumitomo Heavy Industries
  Cryopumps and cryocoolers · HQ: Tokyo · 1 product page
• KITZ SCT
  Valves for semiconductor process gases and vacuum lines · 1 product page
• Kofloc
  Mass flow controllers, flow meters and gas generators · HQ: Kyotanabe, Kyoto
• Surpass Industry
  Fluoropolymer fittings, couplers, flow sensors and pumps for chemicals · HQ: Gyoda, Saitama
• Shinwa Controls
  Chillers, precision air conditioning and fluid control valves · HQ: Kawasaki, Kanagawa
• Orion Machinery
  Precision chillers, compressed air treatment and vacuum pumps · HQ: Suzaka, Nagano
• NHK Spring (NHK Spring Co.)
  Heaters, cooling plates and showerheads for deposition and etch equipment · HQ: Yokohama, Kanagawa
• Creative Technology
  Electrostatic chucks and chuck power supplies · HQ: Kawasaki, Kanagawa
• Mirapro
  Bellows, vacuum piping and vacuum components · HQ: Hokuto, Yamanashi
• Marumae
  Precision-machined vacuum parts for equipment · HQ: Izumi, Kagoshima
• Azbil
  Sensors, control valves and cleanroom air conditioning control · HQ: Chiyoda, Tokyo
• Koganei
  Clean pneumatic components, chemical valves and electric actuators · HQ: Koganei, Tokyo
• Anritsu Meter
  Thermocouples, surface thermometers and instrumented wafers · 1 product page
• Shinryo Corporation
  Precision cleaning of equipment parts and silicon wafer reclaim
• Showa Science
  Vibration isolation tables and air springs · HQ: Kawasaki, Kanagawa

Equipment categories

Product categories where these companies are listed, with the number of companies from this page in each.

• Ellipsometers (1)
• Organic analysis instruments (1)

Related reading

• Japanese semiconductor equipment by category
• Japanese equipment parts and consumables suppliers
• All products by maker

Other equipment sectors: Wafer processing equipment · Inspection and metrology · Wafer manufacturing equipment · Back-end and packaging equipment · Test and reliability equipment · Fab infrastructure

More on this topic