Koganei
A Tokyo-based maker of pneumatic components and electric actuators that supplies cleanroom-grade cylinders and valves and fluid control parts for chemicals to semiconductor equipment makers.
コガネイ・Equipment components・Last updated: October 27, 2026
Overview
Koganei is headquartered in Koganei, Tokyo. It makes air cylinders, solenoid valves and air filters, and electric actuators.
For semiconductor equipment it offers cleanroom versions of these parts, valves and dispensing devices for chemicals, and static elimination products.
Business: Clean pneumatic components, chemical valves and electric actuators
Why it matters
- Most moving parts inside a tool are pneumatic or electric actuators, and the particles they shed affect chamber cleanliness.
- Chemical valves for wet processes must be made from materials that resist acids and solvents.
Main products
- •Air cylinders and solenoid valves
- •Chemical valves and dispensing devices
- •Electric actuators
Sites in Japan
Koganei, Tokyo