Daihen
An Osaka-based electrical equipment maker that supplies RF power generators and matching networks for plasma equipment, as well as atmospheric and vacuum wafer transfer robots.
ダイヘン・Equipment components・Last updated: October 27, 2026
Overview
Daihen is headquartered in Osaka and has roots in power equipment and welding machines. For semiconductor equipment it designs RF generators and the matching networks that couple them to the plasma chamber.
It also makes wafer transfer robots for both atmospheric and vacuum environments, so it supplies two key units of an etch or deposition tool.
Business: RF power supplies, matching networks and wafer transfer robots
Why it matters
- RF power stability sets plasma density and therefore etch and deposition rates, so RF supplies are among the most critical parts of plasma tools.
- Vacuum robots move wafers between chambers of a cluster tool without breaking vacuum.
Main products
- •RF generators
- •Impedance matching networks
- •Atmospheric and vacuum wafer transfer robots
Sites in Japan
Head officeHeadquarters
Osaka