Harmonic Drive Systems
A Tokyo-based maker of strain wave gearing (Harmonic Drive), precision reducers with almost no backlash that are used in wafer transfer robots and precision stages.
ハーモニック・ドライブ・システムズ・Equipment components・Last updated: October 27, 2026
Overview
Harmonic Drive Systems is based in Tokyo and specializes in strain wave gears. These compact reducers achieve high reduction ratios with nearly zero backlash.
They are built into the joints of robots and into precision positioning equipment, including wafer transfer robots in semiconductor fabs.
Business: Strain wave gears and precision actuators
Why it matters
- Backlash in a robot joint becomes position error at the wafer, so low-backlash gears improve placement repeatability.
- Compact, light reducers allow slim robot arms that fit between process chambers.
Main products
- •Strain wave gear reducers
- •Precision actuators
Sites in Japan
Head officeHeadquarters
Tokyo