Kofloc
A Kyoto-based maker of flow measurement and control instruments, including mass flow controllers and meters, variable-area, electronic and ultrasonic flow meters, control valves and gas generators.
コフロック・Equipment components・Last updated: October 27, 2026
Overview
Kofloc is headquartered in Kyotanabe, Kyoto. Its mass flow controllers and meters measure and control small, precise gas flows in semiconductor processes such as CVD and etching.
It also makes variable-area, electronic and ultrasonic flow meters, flow control valves and generators for nitrogen, oxygen and ozone.
Business: Mass flow controllers, flow meters and gas generators
Why it matters
- Each process gas line on a tool has its own mass flow controller, so a single etch or CVD tool can use a dozen or more.
- Flow accuracy affects film composition and etch selectivity directly.
Main products
- •Mass flow controllers and meters
- •Variable-area, electronic and ultrasonic flow meters
- •Nitrogen, oxygen and ozone generators
Sites in Japan
Head officeHeadquarters
Kyotanabe, Kyoto