Sumitomo Heavy Industries
A Tokyo-based industrial machinery group that applies its cryogenic technology to cryopumps and GM cryocoolers used in the high-vacuum systems of semiconductor equipment.
住友重機械工業・Equipment components・Last updated: October 27, 2026
Overview
Sumitomo Heavy Industries is headquartered in Tokyo and makes a wide range of industrial machinery. In semiconductors it is known for cryopumps, which reach high vacuum by freezing gas molecules onto very cold surfaces, and for the Gifford-McMahon (GM) cryocoolers that cool them.
Its ion implanter business is run by a separate group company, Sumitomo Heavy Industries Ion Technology.
Business: Cryopumps and cryocoolers
Why it matters
- Sputtering and ion implantation need a clean high vacuum, and cryopumps provide it without oil.
- The same cryocooler technology is used in MRI magnets and research equipment.
Main products
- •Cryopumps
- •GM cryocoolers
Sites in Japan
Head officeHeadquarters
Tokyo
Products (1)
- Marathon® CP · Cryopumps