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Shinwa Controls

A Kawasaki-based maker of temperature control units (chillers) and precision air conditioning for semiconductor equipment, along with solenoid valves, motor-operated valves and microvalves.

伸和コントロールズ・Equipment components・Last updated: October 27, 2026

Overview

Shinwa Controls is headquartered in Asao, Kawasaki. It develops chillers and precision air conditioning units for semiconductor and FPD equipment, based on high-precision fluid temperature control.

It also makes fluid control devices such as solenoid valves, motor-operated valves and microvalves.

Business: Chillers, precision air conditioning and fluid control valves

Why it matters

  • Chillers hold electrodes and chamber walls at a fixed temperature, which keeps etch and deposition rates repeatable.
  • Exposure tools need very stable air temperature around the optics, which is the role of precision air conditioning.

Main products

  • •Chillers for semiconductor equipment
  • •Precision air conditioning units
  • •Solenoid, motor-operated and micro valves

Sites in Japan

Head officeHeadquarters

Kawasaki, Kanagawa

Related pages

Sources

  1. Shinwa Controls: official website
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