Shinwa Controls
A Kawasaki-based maker of temperature control units (chillers) and precision air conditioning for semiconductor equipment, along with solenoid valves, motor-operated valves and microvalves.
伸和コントロールズ・Equipment components・Last updated: October 27, 2026
Overview
Shinwa Controls is headquartered in Asao, Kawasaki. It develops chillers and precision air conditioning units for semiconductor and FPD equipment, based on high-precision fluid temperature control.
It also makes fluid control devices such as solenoid valves, motor-operated valves and microvalves.
Business: Chillers, precision air conditioning and fluid control valves
Why it matters
- Chillers hold electrodes and chamber walls at a fixed temperature, which keeps etch and deposition rates repeatable.
- Exposure tools need very stable air temperature around the optics, which is the role of precision air conditioning.
Main products
- •Chillers for semiconductor equipment
- •Precision air conditioning units
- •Solenoid, motor-operated and micro valves
Sites in Japan
Kawasaki, Kanagawa