Orion Machinery
A Nagano-based machinery maker that supplies precision chillers with high temperature stability for semiconductor equipment, along with compressed air dryers and filters and dry vacuum pumps.
オリオン機械・Equipment components・Last updated: October 27, 2026
Overview
Orion Machinery is headquartered in Suzaka, Nagano. For semiconductor equipment it makes precision chillers and constant-temperature water circulators.
It also makes dry vacuum pumps and blowers, and air dryers and filters that clean and dry compressed air.
Business: Precision chillers, compressed air treatment and vacuum pumps
Why it matters
- Fluctuations in cooling water temperature show up as drift in etch and CMP results.
- Clean, dry compressed air drives valves and actuators throughout a fab.
Main products
- •Precision chillers
- •Constant-temperature water circulators
- •Dry vacuum pumps and blowers
- •Compressed air dryers and filters
Sites in Japan
Head officeHeadquarters
Suzaka, Nagano