NHK Spring (NHK Spring Co.)
A Yokohama-based maker of automotive springs whose industrial business makes process parts for semiconductor equipment, such as wafer heaters, cooling plates and gas showerheads.
ニッパツ（日本発条）・Equipment components・Last updated: October 27, 2026
Overview
NHK Spring is headquartered in Yokohama and is best known for automotive springs. Its industrial equipment business makes parts for semiconductor deposition and etch equipment.
These include heaters and cooling plates that heat or cool wafers evenly and showerheads that distribute process gas, produced at plants in Isehara, Kanagawa and Miyata, Nagano.
Business: Heaters, cooling plates and showerheads for deposition and etch equipment
Why it matters
- Temperature uniformity across the wafer translates directly into film thickness and etch uniformity.
- Showerheads set how evenly gas reaches the wafer, so their hole pattern and machining matter for every process.
Main products
- •Wafer heaters
- •Cooling plates
- •Gas showerheads
Sites in Japan
Head officeHeadquarters
Yokohama, Kanagawa
Isehara plantPlant
Isehara, Kanagawa
Miyata plantPlant
Miyata, Nagano