CKD
An Aichi-based maker of automation and fluid control components, including metal-diaphragm regulators for semiconductor process gases.
CKD・Equipment・Last updated: October 23, 2026
Overview
CKD is headquartered in Aichi Prefecture and has plants in Yokkaichi, Mie and in Miyagi. For semiconductor equipment it makes the PGM series of process gas regulators, which use metal diaphragms and cover set pressures from -0.07 to 0.7 MPa in 10 models.
Business: Process gas regulators and fluid control components
Why it matters
Gas pressure stability at the tool affects process repeatability in deposition and etching.
Main products
- •Process gas regulators (PGM series)
Sites in Japan
Head officeHeadquarters
Aichi
Yokkaichi PlantPlant
Yokkaichi, Mie
Tohoku PlantPlant
Ohira, Miyagi
Products (1)
- PGM series · Pressure controllers and flow meters