Fujikin
An Osaka-based maker of ultra-high-purity valves, pressure-based flow controllers and integrated gas systems for semiconductor equipment.
フジキン・Equipment・Last updated: October 23, 2026
Overview
Fujikin is headquartered in Osaka. Its FCS-P8500 is a pressure-based flow controller that covers 1 to 1,000 cm³/min in one unit, with 10 times the rangeability and 40 times the accuracy of earlier models.
Its IGS integrated gas system arranges valves, filters and regulators on base blocks connected with W-seals, about 1/3 the size of conventional gas boxes. IGS received an excellence award at the 1st Monodzukuri Nippon Grand Award in 2005.
Business: Gas flow controllers and integrated gas systems
Why it matters
Gas delivery components determine how accurately and cleanly process gases reach deposition and etch chambers.
Main products
- •Pressure-based flow controllers (FCS-P8500)
- •Integrated gas systems (IGS)
Sites in Japan
Head officeHeadquarters
Osaka, Osaka
Products (2)
- FCS®-P8500 · Mass flow controllers (MFC)
- IGS® integrated gas system · Fluid and gas components (fittings and tubing)