IWAKI
A Japanese pump maker whose semiconductor products include air-driven bellows pumps with fluoropolymer wetted parts.
イワキ・Equipment・Last updated: October 23, 2026
Overview
IWAKI makes air-driven bellows pumps for semiconductor processes. The FS-H series has all wetted parts in fluoropolymer and a fluoropolymer-coated exterior, handles liquid temperatures of 5 to 180 °C and is used for wafer cleaning, CMP and chemical supply. The FS-N series delivers up to 100 L/min.
Business: Chemical pumps
Why it matters
Pumps that touch process chemicals must not add metal contamination or particles, which is why fluoropolymer wetted parts are used.
Main products
- •Air-driven bellows pumps (FS-H series, FS-N series)
Products (2)
- FS-H series air-driven bellows pumps · Chemical pumps (bellows pumps)
- FS-N series air-driven bellows pumps · Chemical pumps (bellows pumps)