Canon ANELVA
A Canon group maker of vacuum thin-film equipment, centred on sputtering systems for semiconductors and magnetic devices such as HDD heads and MRAM, together with vacuum components.
キヤノンアネルバ・Wafer processing equipment・Last updated: October 27, 2026
Overview
Canon ANELVA is headquartered in Asao, Kawasaki and became part of the Canon group in 2005. Sputtering, a physical vapour deposition method, has been its core technology.
Its systems deposit multilayer metal and magnetic films, including stacks for metal gates and for the magnetic tunnel junctions used in MRAM, and range from research tools to production systems for 300 mm wafers.
Business: Sputtering and vacuum deposition equipment
Why it matters
- MRAM and magnetic sensors depend on stacks of very thin magnetic layers, which is the kind of deposition Canon ANELVA specializes in.
- With Canon's lithography business, it gives the Canon group a presence in two different front-end steps.
Main products
- •Sputtering systems for semiconductors
- •Multilayer deposition systems for magnetic devices and MRAM
- •Vacuum gauges and components
Equipment categories
Categories where Canon ANELVA is listed, with other Japanese makers and their products:
Sites in Japan
Kawasaki, Kanagawa