Elionix
A Japanese specialist in electron-beam lithography systems, which write very fine patterns directly with an electron beam and are widely used in research and nanofabrication.
エリオニクス・Wafer processing equipment・Last updated: October 27, 2026
Overview
Elionix specializes in electron-beam (EB) lithography. Its systems draw patterns directly on a resist-coated substrate without a photomask, which makes them suited to research, prototyping and fine pattern formation.
It supplies these systems to universities, research institutes and companies in Japan and abroad.
Business: Electron-beam lithography systems
Why it matters
- Direct-write EB lithography is slow for volume production but can define features far smaller than optical lithography in research settings.
- EB writers are also used to make templates for nanoimprint lithography.
Main products
- •Electron-beam lithography systems
Products (1)
- ELS-BODEN series · Electron-beam direct write systems