Sumitomo Precision Products
An Amagasaki-based precision equipment maker whose businesses include MEMS and semiconductor manufacturing equipment, such as deep silicon etching systems, alongside aerospace, heat exchangers and MEMS devices.
住友精密工業・Wafer processing equipment・Last updated: October 27, 2026
Overview
Sumitomo Precision Products is headquartered in Amagasaki, Hyogo. Besides aerospace equipment, heat exchangers, hydraulic controls and ozone generators, it has a business in MEMS and semiconductor manufacturing equipment and makes MEMS devices such as gyro sensors.
The equipment business was run by its wholly owned subsidiary SPP Technologies, which develops and makes equipment for manufacturing MEMS devices. In 2026 the company announced that it would absorb SPP Technologies, with the merger planned for October 1, 2026.
Business: MEMS and semiconductor manufacturing equipment (deep silicon etching)
Why it matters
- MEMS sensors and through-silicon vias need deep, vertical holes in silicon, which is a different problem from the fine etching used for logic transistors.
- Making MEMS devices as well as MEMS equipment gives the company a user's view of its own tools.
Main products
- •Deep silicon etching (DRIE) systems for MEMS and TSVs
- •Plasma CVD systems
- •MEMS gyro sensors and inertial systems
Equipment categories
Categories where Sumitomo Precision Products is listed, with other Japanese makers and their products:
Sites in Japan
Amagasaki, Hyogo