Litho Tech Japan
A Saitama-based maker of lithography process equipment for research and development, including resist coaters, developers and bake plates, which also offers resist evaluation services.
リソテックジャパン・Wafer processing equipment・Last updated: October 27, 2026
Overview
Litho Tech Japan is headquartered in Kawaguchi, Saitama. It builds automatic and manual coating and developing equipment and single-wafer and batch bake systems.
It also develops instruments for evaluating photoresists and carries out resist evaluation on contract, which connects it to resist makers as well as device makers.
Business: Resist coating, developing and bake equipment; resist evaluation
Why it matters
- New photoresists are screened on small coat, bake and develop tools long before they reach a production track.
- Bake temperature and time control how acid diffuses in chemically amplified resists, so bake equipment affects final line widths.
Main products
- •Automatic and manual coater/developers
- •Bake systems (single-wafer and batch)
- •Resist evaluation instruments and services
Sites in Japan
Head officeHeadquarters
Kawaguchi, Saitama