Dainippon Kaken
A Japanese lithography equipment maker offering mask aligners for compound semiconductors, maskless exposure systems and exposure tools for MEMS, film and display substrates.
大日本科研・Wafer processing equipment・Last updated: October 27, 2026
Overview
Dainippon Kaken builds exposure equipment for research and production. Its products include mask aligners for compound semiconductors used in LEDs, laser diodes and packaging, and exposure systems for 200 mm and 300 mm wafers.
It also offers the MX series of maskless exposure systems, plus exposure tools for MEMS, films and flat-panel displays.
Business: Mask aligners and maskless exposure systems
Why it matters
- Compound semiconductor and MEMS fabs use small and odd-sized substrates, which are often handled with mask aligners rather than scanners.
- Maskless exposure avoids the cost of making a mask for each design, which suits prototyping and small lots.
Main products
- •Maskless exposure systems (MX series)
- •Mask aligners for compound semiconductors
- •Exposure systems for MEMS, film and FPD substrates