Dalton
A Japanese maker of laboratory equipment and semiconductor wet-process tools, covering resist stripping, cleaning, drying, plating and solvent recovery from R&D units to production machines.
ダルトン・Wafer processing equipment・Last updated: October 27, 2026
Overview
Dalton builds laboratory furniture and research facilities as well as semiconductor manufacturing equipment. In semiconductors it focuses on wet processes for wafers and jigs.
Its range covers resist stripping, cleaning and drying, plating and solvent recycling, with both small-lot machines for development and systems for production.
Business: Wet process equipment: resist stripping, cleaning, drying and plating
Why it matters
- Wet steps such as stripping and cleaning are repeated many times in a process flow, and smaller fabs often need flexible tools rather than high-throughput lines.
- Solvent recovery reduces chemical consumption and waste from wet processes.
Main products
- •Resist stripping equipment
- •Wet cleaning and drying equipment
- •Plating equipment
- •Solvent recovery systems