Tokyo Electron (TEL)
Japan's largest semiconductor equipment maker and a leading supplier of coater/developers for lithography, with etch and deposition systems that cover several critical front-end steps.
東京エレクトロン・Equipment・Last updated: October 15, 2026
Overview
Founded in 1963 and headquartered in Akasaka, Minato, Tokyo, Tokyo Electron supplies equipment for photoresist coating and developing, dry etching and thin-film deposition. Few equipment makers cover as many front-end process steps.
Its development and manufacturing sites in Japan are in Yamanashi, Iwate and Kumamoto prefectures. The Koshi site in Kumamoto lies next to Kikuyo, where TSMC's majority-owned JASM fab operates, and is part of the semiconductor cluster taking shape in Kyushu.
Business: Coat/develop, etch and deposition equipment
Why it matters
Main products
- •Coater/developers (CLEAN TRACK ACT and CLEAN TRACK LITHIUS series)
- •Dry etch systems (Tactras series)
- •Deposition systems (batch and single-wafer CVD/ALD)
Sites in Japan
Minato, Tokyo
Nirasaki, Yamanashi
Oshu, Iwate
Koshi, Kumamoto
Other Japanese companies: Equipment
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- AdvantestJapanAutomated test equipment (ATE) for SoC and memory
- DISCOJapanDicing, grinding and polishing equipment
- LasertecJapanEUV mask and mask blank inspection
- Kokusai ElectricJapanBatch deposition, diffusion and ALD equipment
- EbaraJapanCMP systems, dry vacuum pumps and exhaust treatment
- Tokyo Seimitsu (ACCRETECH)JapanWafer probers, dicing and grinding machines, metrology