Shinko Seiki
A Kobe-based vacuum technology company that makes vacuum pumps and components as well as deposition systems, plasma ashing equipment and vacuum soldering systems.
神港精機・Wafer processing equipment・Last updated: October 27, 2026
Overview
Shinko Seiki is headquartered in Kobe, Hyogo. It makes vacuum pumps and components and builds equipment on top of them, so pumps and process tools come from the same company.
Its equipment covers evaporation, sputtering and ion plating for thin films, plasma treatment including ashing and atmospheric-pressure plasma, vacuum soldering and bonding, and vacuum heat treatment.
Business: Vacuum pumps, thin-film deposition, plasma ashing and vacuum soldering equipment
Why it matters
- Vacuum soldering removes voids from solder joints, which matters for power modules that must carry heat away from the chip.
- Ashing removes photoresist with oxygen plasma after etching or implantation.
Main products
- •Evaporation, sputtering and ion plating systems
- •Plasma ashing and atmospheric-pressure plasma equipment
- •Vacuum soldering systems
- •Vacuum pumps and components
Equipment categories
Categories where Shinko Seiki is listed, with other Japanese makers and their products:
Sites in Japan
Kobe, Hyogo