NuFlare Technology
A Yokohama-based maker of electron-beam mask writers, the tools that draw circuit patterns onto photomasks, including multi-beam writers for EUV-generation masks. It is part of the Toshiba group.
ニューフレアテクノロジー・Wafer processing equipment・Last updated: October 27, 2026
Overview
NuFlare Technology is headquartered in Yokohama and is a subsidiary of Toshiba Electronic Devices & Storage. It was formed from the semiconductor equipment business of Toshiba Machine.
Its main products are electron-beam (EB) mask writers: the single-beam EBM series and the multi-beam MBM series. The company also makes mask inspection systems and epitaxial growth equipment.
Business: Electron-beam mask writers, mask inspection and epitaxial reactors
Why it matters
- Every photomask used in a fab is written once by a mask writer, so mask writers sit at the very start of the lithography chain.
- EUV masks carry denser and more complex patterns, and multi-beam writers were developed to keep write times practical for them.
Main products
- •Multi-beam mask writers (MBM series)
- •Single-beam mask writers (EBM series)
- •Mask inspection systems
- •Epitaxial growth equipment
Sites in Japan
Head officeHeadquarters
Yokohama, Kanagawa
Products (1)
- MBM-3000 · Electron-beam mask writers