MEMS manufacturing equipment
MEMS (micro-electro-mechanical systems) such as pressure sensors, microphones, inertial sensors and optical components are made with semiconductor processes, but often on materials and structures that standard logic tools are not built for: deep cavities, quartz, glass, LN and LT substrates, and released moving parts.
What it does
Equipment in this category includes etchers and other process tools adapted to these materials, and test systems that apply temperature and pressure to sensors while measuring them.
Products (6)
- HA7200 · Advantest
A unit that provides a fast, accurate temperature and pressure environment for testing pressure sensors, including those for automotive use.
- HA7300 · Advantest
A test cell that controls the temperature of 8 devices at once and applies temperature and pressure together to test differential pressure sensors.
- ASE-Pegasus · SPP Technologies
A production silicon deep etching system that adds proprietary technology to the Bosch process. It combines vertical profiles and low sidewall roughness with high selectivity and high etch rate.
- Tactras™ · Tokyo Electron (TEL)
Tokyo Electron's plasma etch system for 300 mm wafers. Since its launch in 2006, its face-to-face chamber layout has combined a small footprint with fast wafer transfer.
- NLD-570 · ULVAC
A dry etching system that processes quartz, glass, LN, LT and other materials with ULVAC's own magnetic neutral loop discharge (NLD) plasma.
- NLD-5700 · ULVAC
A production dry etching system for optical devices and MEMS with NLD plasma.
Japanese makers in this category
- Advantest · 2 product(s) listed
- SPP Technologies · 1 product(s) listed
- Tokyo Electron (TEL) · 1 product(s) listed
- ULVAC · 2 product(s) listed
Other equipment by device type
Sources
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Japanese equipment by category
MEMS manufacturing equipment
Last updated: October 23, 2026