AW series thermocouple wafers
Anritsu Meter's thermocouple wafers for tool development, process setup and temperature distribution measurement. They can be built by combining options such as the number of sensor points.
Maker: Anritsu Meter · Official product page
Specifications
| Measurements | Temperature (type K thermocouple) |
|---|---|
| Operating temperature | 0 to 500 °C |
| Main applications | Temperature distribution measurement on stages of resist processing tools and others |
Specifications as published by the maker. See the sources below.
Overview
The AW series are Anritsu Meter's silicon wafers with thermocouples. These sensors, made by attaching thermocouples to a silicon wafer, allow actual measurement of the temperature distribution across a wafer inside semiconductor manufacturing equipment.
The maker positions them as an essential tool for developing semiconductor equipment and setting process conditions. The specification can be decided by freely combining wafer size, number of thermocouple sensor points and type of thermocouple insulation, and custom products can also be made.
The representative model AW-0505K-A-TS1-ANP has an operating temperature range of 0 to 500 °C, with a tolerance of ±2.5 °C to ±8.0 °C depending on the temperature range. The model number can be determined by combining specifications with an online tool.
Key features
- Silicon wafers with thermocouples
- Free combination of wafer size, number of sensor points and insulation
- Representative model covers 0 to 500 °C
- Custom products available
Applications
- Measuring wafer temperature distribution inside manufacturing equipment
- Tool development and process setup
Sources
Equipment components and subsystems: more products
Last updated: October 23, 2026