Canon
A camera and office-equipment maker that also builds semiconductor lithography systems. In 2023 it commercialized FPA-1200NZ2C, the first nanoimprint lithography (NIL) system for chip production.
キヤノン・Equipment・Last updated: October 22, 2026
Overview
Canon was founded in 1937 and is headquartered in Ota, Tokyo. Its semiconductor equipment line centers on i-line and KrF steppers and scanners, which are widely used for mature process nodes, power devices and back-end applications.
Instead of projecting a pattern with light, nanoimprint lithography presses a patterned mask into resist on the wafer. Canon says FPA-1200NZ2C can form patterns with a minimum linewidth of 14 nm, which it equates to the 5 nm node. In September 2024 it shipped the system to the Texas Institute for Electronics in the United States.
Business: Lithography steppers and nanoimprint lithography
Why it matters
Main products
- •i-line and KrF steppers and scanners
- •Nanoimprint lithography system (FPA-1200NZ2C)
- •Lithography systems for packaging and display applications
Sites in Japan
Ota, Tokyo
Products (11)
- FPA-1200NZ2C · Nanoimprint lithography (NIL)
- FPA-3030EX6 · DUV lithography systems
- FPA-3030i5a · i-line steppers
- FPA-3030i6 · i-line steppers
- FPA-3030iWa · i-line steppers
- FPA-5520iV · Wafer-level packaging equipment
- FPA-5550iX · i-line steppers
- FPA-5550iZ2 · i-line steppers
- FPA-6300ES6a · DUV lithography systems
- FPA-6300ESW · DUV lithography systems
- FPA-8000iW · Wafer-level packaging equipment