Nikon
One of Japan's two lithography makers. Nikon supplies ArF immersion and dry scanners, KrF scanners and i-line steppers; it does not supply EUV systems, which only ASML makes.
ニコン・Equipment・Last updated: October 22, 2026
Overview
Nikon was founded in 1917 and is headquartered in Shinagawa, Tokyo. Its semiconductor business builds exposure tools that project circuit patterns from a photomask onto the wafer.
In December 2023 Nikon released the NSR-S636E, an ArF immersion scanner for critical layers with a resolution of 38 nm or less, which it positions for logic, memory and image sensor production.
Business: ArF, KrF and i-line lithography systems
Why it matters
Even fabs that use EUV for the finest layers expose most layers with ArF immersion, ArF, KrF or i-line tools, which is where Nikon competes.
Nikon and Canon together are the only lithography system makers outside the Netherlands.
Main products
- •ArF immersion scanners (NSR-S636E and earlier models)
- •ArF and KrF scanners
- •i-line steppers
Sites in Japan
Head officeHeadquarters
Shinagawa, Tokyo
Products (13)
- AMI-5700 · Macro inspection equipment
- DSP-100 · Laser direct imaging systems
- Litho Booster · Overlay metrology
- NSR-2205iL1 · i-line steppers
- NSR-S215D · DUV lithography systems
- NSR-S220D · DUV lithography systems
- NSR-S322F · DUV lithography systems
- NSR-S333F · DUV lithography systems
- NSR-S625E · DUV lithography systems
- NSR-S635E · DUV lithography systems
- NSR-S636E · DUV lithography systems
- NSR-SF155 · i-line steppers
- OPTISTATION-3200 · Macro inspection equipment