Ebara
A pump and industrial machinery maker founded in 1912 whose precision machinery business supplies CMP systems, dry vacuum pumps and exhaust gas abatement to semiconductor fabs.
荏原製作所・Equipment・Last updated: October 15, 2026
Overview
Ebara is headquartered in Haneda, Ota, Tokyo. Its semiconductor-related equipment is developed and produced at sites including Fujisawa in Kanagawa Prefecture and a plant in Kumamoto Prefecture.
Chemical mechanical planarization (CMP) flattens each layer before the next is patterned, while vacuum pumps and abatement systems are needed by almost every vacuum process tool in a fab.
Business: CMP systems, dry vacuum pumps and exhaust treatment
Why it matters
Vacuum pumps scale with the number of process chambers in a fab, so Ebara benefits from fab construction regardless of which etch or deposition vendor wins.
CMP is a market where Ebara competes mainly with Applied Materials.
Main products
- •CMP systems
- •Dry vacuum pumps for process tools
- •Exhaust gas abatement systems
Sites in Japan
Head officeHeadquarters
Ota, Tokyo
Fujisawa sitePlant
Fujisawa, Kanagawa
Kumamoto plantPlant
Kumamoto
Other Japanese companies: Equipment
- Tokyo Electron (TEL)JapanCoat/develop, etch and deposition equipment
- SCREEN HoldingsJapanWafer cleaning, coat/develop and inspection equipment
- AdvantestJapanAutomated test equipment (ATE) for SoC and memory
- DISCOJapanDicing, grinding and polishing equipment
- LasertecJapanEUV mask and mask blank inspection
- Kokusai ElectricJapanBatch deposition, diffusion and ALD equipment
- Tokyo Seimitsu (ACCRETECH)JapanWafer probers, dicing and grinding machines, metrology