Hirata Corporation
A production systems engineering company that supplies wafer transfer units, EFEMs and load ports, mainly built into equipment made by semiconductor tool makers.
平田機工・Equipment components・Last updated: October 27, 2026
Overview
Hirata Corporation designs automated production systems. In semiconductors it supplies wafer transfer units, equipment front-end modules and load ports to equipment makers, who integrate them into their tools.
Outside semiconductors it builds assembly lines for the automotive and home appliance industries.
Business: EFEMs, load ports and wafer transfer units
Why it matters
- Many equipment makers buy their wafer handling front end from specialists rather than designing it themselves.
- Experience with automotive production lines carries over to integrating robots, sensors and controls.
Main products
- •EFEMs
- •Load ports
- •Wafer transfer units
- •Automated assembly lines
Sites in Japan
Head officeHeadquarters
Shinagawa, Tokyo