VALQUA
A Tokyo-based maker of seals and fluoropolymer products, including high-purity seals for dry process equipment.
バルカー・Materials・Last updated: October 23, 2026
Overview
VALQUA is headquartered in Shinagawa, Tokyo. VALQUA ARMOR is a high-purity rubber seal developed for dry process equipment, made with VALQUA's own rubber modification technology. It generates few particles, contains no metals and has low gas permeation and outgassing, and is used in dry etching, CVD and ashing equipment.
Business: Seals and fluoropolymer products
Why it matters
Seals in plasma chambers wear and shed particles, so seal materials affect defects and maintenance intervals.
Main products
- •High-purity seals for dry process equipment (VALQUA ARMOR)
Sites in Japan
Head officeHeadquarters
Shinagawa, Tokyo
Products (1)
- VALQUA ARMOR · O-rings and seals