ULVAC
A vacuum technology company founded in 1952 that builds sputtering and other deposition systems for semiconductors, displays and electronic components, together with vacuum pumps and gauges.
アルバック・Equipment・Last updated: October 22, 2026
Overview
ULVAC was established in August 1952 and is headquartered in Chigasaki, Kanagawa. Its name comes from "ultimate vacuum", and its products range from complete deposition systems to the pumps and instruments that create and measure vacuum.
In semiconductors it is known for sputtering systems, which deposit thin metal films by knocking atoms off a target material. Its corporate profile lists a site in Susono, Shizuoka, dedicated to semiconductor production equipment.
Business: Vacuum deposition (sputtering) equipment and vacuum pumps
Why it matters
Main products
- •Sputtering systems for semiconductors and displays
- •Other vacuum deposition systems
- •Vacuum pumps and vacuum gauges
Sites in Japan
Chigasaki, Kanagawa
Susono, Shizuoka
Products (25)
- CC-200 · PECVD equipment
- CCMT-D series · Vacuum gauges
- CME · PECVD equipment
- CME-200E · CVD equipment
- CS · Sputtering equipment
- ei-5 · Vacuum evaporation equipment
- ei-5 / EVD-600LP · Vacuum evaporation equipment
- ENTRON-EX W300 · PVD equipment
- ENTRON-EXX · PVD equipment
- H83 / H84 · Diffusion furnaces
- HELIOT 900 series · Leak detectors
- IH · High-energy ion implanters
- IMX-3500 · Medium-current ion implanters
- Luminous NA series · Ashing equipment
- NE-550EX · Dry etching equipment
- NLD-570 · MEMS manufacturing equipment
- NLD-5700 · MEMS manufacturing equipment
- RISE-300 · Dry cleaning equipment
- SEGul-200 · Compound semiconductor equipment
- SME · Sputtering equipment
- SOPHI · Medium-current ion implanters
- SOPHI-400 · High-energy ion implanters
- SRH · Sputtering equipment
- uGmni-200C · PECVD equipment
- uGmni-200E · Dry etching equipment