Vacuum evaporation equipment
Vacuum evaporation equipment heats source material with an electron beam or resistance heater in high vacuum so that it evaporates and condenses on the substrate. Because the vapor travels in straight lines, it suits lift-off patterning.
What it does
It is widely used to form metal electrodes on compound semiconductors, power devices, LEDs and laser diodes.
Products (3)
- SEC-22C · Showa Shinku
A multi-function vacuum evaporation system with an electron beam source and a cryopump. Evaporated material reaches the wafer almost perpendicularly, making it suited to lift-off.
- ei-5 · ULVAC
ULVAC's batch evaporation system for R&D through small-volume production. Pumping and deposition run automatically from the control panel.
- ei-5 / EVD-600LP · ULVAC
ei-5, a general-purpose evaporation system for R&D and small-volume production, and EVD-600LP, a production evaporation system for lift-off.
Japanese makers in this category
- Showa Shinku · 1 product(s) listed
- ULVAC · 2 product(s) listed
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Vacuum evaporation equipment
Last updated: October 23, 2026