Sinfonia Technology
A Tokyo-based maker of clean transport equipment for semiconductor fabs, including load ports that connect FOUPs to process tools and equipment front-end modules (EFEMs) that move wafers inside them.
シンフォニアテクノロジー・Equipment components・Last updated: October 27, 2026
Overview
Sinfonia Technology is headquartered in Tokyo. Its semiconductor products are load ports, equipment front-end modules (EFEMs) and wafer transfer robots.
A load port opens the FOUP that carries wafers through the fab, and the EFEM transfers wafers between the FOUP and the process chambers in a clean mini-environment.
Business: Load ports, EFEMs and wafer transfer robots
Why it matters
- Almost every 300 mm process tool has load ports and an EFEM, so these parts are installed in large numbers.
- The EFEM's mini-environment keeps wafers clean even when the surrounding cleanroom is less strictly controlled.
Main products
- •Load ports
- •Equipment front-end modules (EFEMs)
- •Wafer transfer robots
Sites in Japan
Head officeHeadquarters
Tokyo