Takano
A Nagano-based manufacturer whose inspection business makes wafer surface inspection systems that detect nanoscale particles on unpatterned wafers, alongside office furniture, springs and other products.
タカノ・Inspection and metrology・Last updated: October 27, 2026
Overview
Takano is headquartered in Miyada, Nagano and has several unrelated businesses, from office chairs and exterior products to springs, valves and medical equipment. Its image processing and inspection business develops inspection and measurement systems.
For semiconductors it makes the WM series of wafer surface inspection systems, which detect particles on unpatterned wafers: the WM-7SR+ for 2 to 8 inch wafers and the WM-10R+ for 4 to 12 inch wafers.
Business: Wafer surface inspection systems
Why it matters
- Bare-wafer inspection is used by wafer makers before shipment and by fabs to check incoming wafers and monitor tool cleanliness.
- Particle counts on monitor wafers are a common way to qualify a process tool after maintenance.
Main products
- •Wafer surface inspection systems (WM-7SR+, WM-10R+)
- •Image processing inspection and measurement systems
Sites in Japan
Miyada, Nagano