Hitachi High-Tech
A wholly owned Hitachi group company and the market leader in CD-SEMs, the electron-beam microscopes fabs use to measure the width of patterned lines. It also builds defect inspection and plasma etch systems.
日立ハイテク・Equipment・Last updated: October 22, 2026
Overview
Hitachi High-Tech is headquartered in Toranomon, Minato, Tokyo, and became a wholly owned subsidiary of Hitachi in 2020. Its semiconductor equipment includes critical-dimension SEMs (CD-SEMs), wafer defect inspection systems and plasma etching systems.
Hitachi says the company holds the top market share in CD-SEMs. These tools check after lithography and etch that patterns have the intended dimensions.
Business: CD-SEM metrology, defect inspection and etch systems
Why it matters
Metrology is a step where the US company KLA leads overall, but Hitachi High-Tech is the main supplier of CD-SEMs.
As patterns shrink, more measurement points are needed per wafer, which raises demand for metrology tools.
Main products
- •CD-SEM metrology systems
- •Wafer defect inspection and review systems
- •Plasma etching systems
- •Electron microscopes for analysis (SEM, TEM)
Sites in Japan
Head officeHeadquarters
Minato, Tokyo
Products (16)
- 9000 series · Polysilicon etchers
- ArBlade® 5000 · Decapsulation and cross-sectioning equipment
- CG7300 · CD-SEMs
- CR7300 · Review SEMs
- CS5000 · CD-SEMs
- CT1000 · Review SEMs
- CV7300 · CD-SEMs
- DI2800 · Optical wafer inspection equipment
- DI4600 · Wafer inspection equipment
- GT2000 · CD-SEMs
- LS9300AD · Particle inspection equipment
- M-600 / 6000 series · Power semiconductor manufacturing equipment
- M-8000 series · Polysilicon etchers
- NEXTA® STA200 · Thermal analysis instruments (TG-DTA/DSC)
- NanoProber® NP8000 · Failure analysis equipment
- SU7000 · Electron microscopes for observation (SEM/TEM)