JEOL
A Japanese maker of electron optics instruments, including electron beam lithography systems for masks and direct writing, scanning electron microscopes and Auger microprobes.
日本電子・Equipment・Last updated: October 23, 2026
Overview
JEOL makes electron beam lithography systems: the JBX-3200MVS, a 50 kV variable shaped beam system for writing photomasks and reticles at the 32 to 28 nm nodes, and the JBX-8100FS, a spot-beam system for direct writing of nanostructures up to 200 kV.
For analysis, it makes the JSM-IT810 field emission SEM, the JAMP-9510F Auger microprobe and the IB-19530CP Cross Section Polisher, which prepares cross-section samples with an argon ion beam.
Business: Electron beam lithography systems, electron microscopes and surface analysis
Why it matters
JEOL covers both patterning with electron beams and observing the results, two uses of the same electron optics.
Its direct-write systems are used in research and compound semiconductor device production.
Main products
- •Electron beam lithography systems (JBX-3200MVS, JBX-8100FS)
- •Scanning electron microscopes (JSM-IT810)
- •Auger microprobes (JAMP-9510F)
- •Cross-section sample preparation (IB-19530CP)
Products (5)
- Cross Section Polisher™ IB-19530CP · Decapsulation and cross-sectioning equipment
- JAMP-9510F · Surface analysis instruments (XPS/SIMS)
- JBX-3200MVS · Electron-beam mask writers
- JBX-8100FS · Electron-beam direct write systems
- JSM-IT810 · Electron microscopes for observation (SEM/TEM)